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Staff Software Engineer

Onto Innovation

Wilmington, MA · $130k–$194k a year · Posted October 21, 2026

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Pay compared with the market

This listing pays about $162,000 a year. Across 412 open staff software engineer listings that state pay, the middle half runs $222,000 to $264,000 and the median is $240,000. That is 32% below the median, below the middle half of those listings.

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  • C#

About the job

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient.

Job Summary & Responsibilities

The Staff Software Engineer will play a key role in architecting and developing software that enables reliable wafer handling, robotics coordination, safety interlocks, motion control, system orchestration, and factory automation interfaces for a standardized EFEM (Equipment Front End Module) platform. This role involves designing and implementing reusable software components, integrating hardware subsystems, and contributing to a scalable architecture adopted across Onto products.

The ideal candidate has strong experience in structured real-time software design, complex electromechanical systems, HW/SW integration.

Key Responsibilities:

Act as lead software engineer on new projects, determining requirements and a robust design, and collaborating with hardware engineers to ensure seamless hardware-software integration

Develop software modules for wafer-handling robotics, load ports, sensors, pre-aligners, and system-level orchestration

Design of extensible APIs, control interfaces, and internal communication frameworks

Optimize software performance and ensure scalability

Provide mentoring and guidance to more junior team members

Develop automated tests, simulation tools, and validation frameworks for EFEM software

Perform system‑level troubleshooting, data analysis, and optimization of EFEM software performance

Identify and drive process, architecture, and code quality improvements across the EFEM software stack and across multiple teams/modules

Qualifications

Qualifications

Bachelor’s or Master’s degree in Computer Science, Computer Engineering, Electrical Engineering, or a related field.

Proven experience (10+ years for Staff level) in software development for highly technical applications, including leading architecture/design of large-scale, mission-critical software systems

Experience driving technical roadmaps, resolving cross-team dependencies, and making tradeoffs across performance, maintainability, and schedule.

Strong knowledge of hardware-software integration and experience working with complex systems.

Deep expertise in .NET including runtime behavior, performance, threading, and memory management.

Strong C# proficiency using modern features

Experience structuring systems using clean architectural patterns, dependency injection, modularity, and API versioning.

Mastery of concurrency design: multithreading, synchronization, message passing, actor models, and preventing deadlocks/race conditions.

Experience designing/maintaining APIs and integration points:

Internal IPC (gRPC, message bus, shared memory, etc.)

External interfaces (factory host integration, equipment automation)

Demonstrated experience debugging complex multi-threaded environments.

Must be able to travel internationally to customer sites at least 20% of the time, with additional travel as business needs require.

Preferred Qualifications:

Experience in the semiconductor industry, robotics, or similar sector

Experience with SEMI standards such as E84, E87, E90, E30, E37

Why Join Onto Innovation?

At Onto Innovation, we believe your work should matter—and so should your well-being. That’s why we offer competitive salaries and a comprehensive benefits package designed to support you and your family. From health, dental, and vision coverage to life and disability insurance, PTO, and a 401(k) with employer match, we’ve got you covered. You’ll also enjoy access to our Employee Stock Purchase Program (ESPP), wellness initiatives, and cutting-edge tools—all within a collaborative, inclusive culture where your contributions are valued and recognized.

Compensation & Growth

• Base Salary Range: $129,600.00 - $194,400.00, offered in good faith and based on experience, location, and qualifications.

Additional Rewards: Annual bonus opportunities and potential long-term incentives tied to both company and individual success.

Empowering Every Voice to Shape the Future:

Onto Innovation is committed to creating a workplace where every qualified candidate has an equal opportunity to succeed. We evaluate applicants based on skills, experience, and potential - without regard to race, color, religion, gender, sexual orientation, national origin, age, disability, veteran status, or any other characteristic protected by law. We believe diversity of thought and background drives innovation and strengthens our team.

Important Note on Export Compliance

For certain positions requiring access to technical data, U.S. export licensing review may be necessary for applicants who are not U.S. Citizens, Permanent Residents, or other protected persons under 8 U.S.C. 1324b(a)(3).